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HOME> Foundry Service
> PVD |
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Wafer
diameter |
100mm |
Thickness |
~ 0.5um |
Uniformity |
1¥ò < 1% |
Remark |
Ti, Al, Mo, AlN |
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Wafer
diameter |
150mm |
Thickness |
~ 0.5um |
Uniformity |
1¥ò < 5% |
Remark |
Cr, Al, Ni |
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Wafer
diameter |
100mm |
Thickness |
~ 0.5um |
Uniformity |
1¥ò < 1.5% |
Remark |
Ti, Al, Mo, Au, Pt |
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Wafer
diameter |
150mm |
Thickness |
~ 0.5um |
Uniformity |
1¥ò < 5% |
Remark |
Ti, Al, Au |
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