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HOME> Foundry Service
> Etching |
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Wafer
diameter |
100mm, 150mm |
Uniformity |
1~3% |
Material |
Pt, PZT, Al, Si, Poly-Si,
SiO2, SiNx,
AlN, Mo, Ti, Au, |
Remark |
HDP Etcher(Helicon)/ICP |
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Wafer
diameter |
100mm, 150mm |
Thickness |
~ few um |
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Name
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XeF2 Etcher |
Wafer
diameter |
100mm, 150mm |
Material |
Si, Poly-Si, a-Si |
Remark |
Isotropic etching |
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